Integrated processes are those that combine more than one specific unit process into a single piece of equipment or into a group of work stations that are operated under unified control (NRC, 1992).

New integration and patterning schemes used in 3D memory and logic devices have created manufacturing and yield challenges. Industrial focus has shifted from the scaling of predictable unit processes ...

The development of systems for the onboard treatment of ballast water has been under way since the late 90’s. By water treatment process equipment standards, the market may no longer be embryonic, but ...

Larger arrays of electron spin qubits require radical improvements in fabrication and device uniformity. Here we demonstrate excellent qubit device uniformity and tunability from 300K down to mK ...

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